Spatial multiplexing and autofocus in holographic contouring for inspection of micro-parts

We present a method for fast geometrical inspection of micro deep drawing parts. It is based on single-shot two-wavelength contouring digital holographic microscopy (DHM). Within the capturing process, spatial multiplexing is utilized in order to record the two required holograms in a single-shot. For fast evaluation, determining the locations where the object is in focus and stitching all focus object's areas together is achieved digitally without the need for any external intervention using an autofocus algorithm. Thus, the limited depth of focus of the microscope objective is improved. The autofocus algorithm is based on minimizing the total variation (TV) of phase difference residuals of the two-wavelength measurements. In contrast to standard DHM, an object side telecentric microscope objective is used for overcoming the image distortions caused by a conventional microscope objective. The method is used to reconstruct the 3D geometrical shape of a cold drawing micro cup. Experimental results verify the improvement of DHM's depth of focus.