Mass Sensing for the Advanced Fabrication of Nanomechanical
Resonators
Version 2 2019-09-12, 07:29Version 2 2019-09-12, 07:29
Version 1 2019-09-11, 13:44Version 1 2019-09-11, 13:44
Posted on 2019-09-12 - 07:29
We
report on a nanomechanical engineering method to monitor matter
growth in real time via e-beam electromechanical coupling. This method
relies on the exceptional mass sensing capabilities of nanomechanical
resonators. Focused electron beam-induced deposition (FEBID) is employed
to selectively grow platinum particles at the free end of singly clamped
nanotube cantilevers. The electron beam has two functions: it allows
both to grow material on the nanotube and to track in real time the
deposited mass by probing the noise-driven mechanical resonance of
the nanotube. On the one hand, this detection method is highly effective
as it can resolve mass deposition with a resolution in the zeptogram
range; on the other hand, this method is simple to use and readily
available to a wide range of potential users because it can be operated
in existing commercial FEBID systems without making any modification.
The presented method allows one to engineer hybrid nanomechanical
resonators with precisely tailored functionalities. It also appears
as a new tool for studying the growth dynamics of ultrathin nanostructures,
opening new opportunities for investigating so far out-of-reach physics
of FEBID and related methods.
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Gruber, G.; Urgell, C.; Tavernarakis, A.; Stavrinadis, A.; Tepsic, S.; Magén, C.; et al. (2019). Mass Sensing for the Advanced Fabrication of Nanomechanical
Resonators. ACS Publications. Collection. https://doi.org/10.1021/acs.nanolett.9b02351