Magnetron Sputter
Grown AlN Nanostructures with Giant
Piezoelectric Response toward Energy Generation
Posted on 2023-05-17 - 13:04
Piezoelectric III–N semiconductor nanostructures
are of
increasing interest to be used for sensor technologies and energy
harvesting. Within this group of materials, AlN is known for the largest
bulk piezoelectric constant, but piezoelectric properties of AlN nanostructures
are not well studied. In the current work, AlN nanostructures are
fabricated by reactive magnetron sputter deposition at normal and
glancing angle orientations on Si substrates covered by a conductive
TiN film. Ag nanoparticles are used to facilitate nucleation of the
nanostructures, which are found to have a bud-like shape consisting
of individual pillars/lamellae. These pillars exhibit a wurtzite-like
hexagonal lattice and preferential growth direction along the c-axis. Piezoresponse force microscopy is used to characterize
the properties of the nanostructures. Giant values of the piezoresponse
coefficient are measured, reaching up to 6 times higher values compared
to AlN bulk and thin films. The obtained results create a basis for
optimization of the fabrication parameters enabling tuning of the
AlN piezoelectric properties and further development of the technology
toward the formation of large-area nanoscale matrixes for energy generation.
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Popok, Vladimir N.; Chirumamilla, Manohar; Krekeler, Tobias; Ritter, Martin; Pedersen, Kjeld (2023). Magnetron Sputter
Grown AlN Nanostructures with Giant
Piezoelectric Response toward Energy Generation. ACS Publications. Collection. https://doi.org/10.1021/acsanm.3c01250
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AUTHORS (5)
VP
Vladimir N. Popok
MC
Manohar Chirumamilla
TK
Tobias Krekeler
MR
Martin Ritter
KP
Kjeld Pedersen
KEYWORDS
si substrates coveredobtained results createlike shape consistinglike hexagonal latticeglancing angle orientationsconductive tin filmarea nanoscale matrixespiezoresponse force microscopyaln piezoelectric propertiespiezoresponse coefficientpiezoelectric propertieswell studiedthin filmstechnology towardsensor technologiespillars exhibitindividual pillarsincreasing interestgiant valuesfacilitate nucleationenergy harvestingenergy generationcurrent workc aln bulkag nanoparticles>- axis