6794016.pdf (1.23 MB)
Supplementary document for Optical proximity correction of hot-spot patterns with subwavelength size in DMD maskless projection lithography - 6794016.pdf
Version 2 2024-02-02, 21:45
Version 1 2024-02-02, 21:45
journal contribution
posted on 2024-02-02, 21:45 authored by xuan-ming duan, xu guo, jing chen, Yuan-Yuan Zhao, SHUN-CHENG CAIsupporting information
