Quantitative Mapping of Unmodulated Temperature Fields with Nanometer Resolution

Quantitative mapping of temperature fields with nanometric resolution is critical in various areas of scientific research and emerging technology, such as nanoelectronics, surface chemistry, plasmonic devices, and quantum systems. A key challenge in achieving quantitative thermal imaging with scanning thermal microscopy (SThM) is the lack of knowledge of the tip–sample thermal resistance (R_TS), which varies with local topography and is critical for quantifying the sample temperature. Recent advances in SThM have enabled simultaneous quantification of R_TS and topography in situations where the temperature field is modulated enabling quantitative thermometry even when topographical features cause significant variations in R_TS. However, such an approach is not applicable to situations where the temperature modulation of the device is not readily possible. Here we show, using custom-fabricated scanning thermal probes (STPs) with a sharp tip (radius ∼25 nm) and an integrated heater/thermometer, that one can quantitatively map unmodulated temperature fields, in a single scan, with ∼7 nm spatial resolution and ∼50 mK temperature resolution in a bandwidth of 1 Hz. This is accomplished by introducing a modulated heat input to the STP and measuring the AC and DC responses of the probe’s temperature which allow for simultaneous mapping of the tip–sample thermal resistance and sample surface temperature. The approach presented herecontact resistance resolved scanning thermal microscopy (CR-SThM)can greatly facilitate temperature mapping of a variety of microdevices under practical operating conditions.