Hydrogen peroxide is widely used in medical and industrial
applications,
and the rapid detection of low concentrations of its vapor is considered
to be a major challenge. In this study, we have successfully implemented
the fabrication of an MWCNTs/Fe2O3:ZnO chemoresistive
sensor for hydrogen peroxide vapor (HPV) detection using RF magnetron
sputtering and electron-beam deposition methods. The material properties
of the MWCNTs/Fe2O3:ZnO structure were characterized
in detail using scanning electron microscopy (SEM), energy-dispersive
X-ray (EDX) elementary analysis, and transmission electron microscopy
(TEM). The HPV sensing performances of the sensors were investigated
in the temperature range 25–250 °C with and without ultraviolet
(UV) irradiation. Sensor response values ranged from 35 to 1043 and
from 7.3 to 198 at operating temperatures of 100 °C (without
UV irradiation) and 150 °C (with UV irradiation), respectively,
in the HPV concentration range of 1.5–22 ppm. Therefore, the
Fe2O3:ZnO material decorated with MWCNTs is
a promising candidate for integration into real-life HPV detection
systems.