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Grazing-incidence transmission SAXS investigation of conical etched ion tracks in SiO2
journal contribution
posted on 2020-02-15, 00:00 authored by A Hadley, C Notthoff, P Mota-Santiago, N Kirby, P Kluth© 2020 Elsevier B.V. We present results of a systematic study of the morphology of etched ion tracks in amorphous SiO2 using a combination of small angle X-ray scattering (SAXS) and scanning electron microscopy. We focus on the analysis of SAXS data obtained in grazing incidence (GISAXS) configuration from conical etched channels with a base radius of less than 50 nm. Swift heavy ion irradiation of 2 μm thick thermally grown SiO2 layers with 185 MeV Au ions was conducted at the ANU Heavy Ion Accelerator Facility in Canberra, Australia. Low irradiation fluences of 109 ions per cm2 were chosen to minimize overlap of the etched structures. Irradiated samples were etched in aqueous hydrofluoric acid (HF) with concentrations of 5%, for etching times between 30 and 90 s. In grazing incidence configuration, we obtain good data quality from the very small cones, since the X-ray beam interacts with a greater proportion of the sample at the very low incidence angle compared with normal transmission mode.
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Alternative title
Grazing-incidence transmission SAXS investigation of conical etched ion tracks in SiO₂Journal
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsVolume
465Pagination
62-66Location
L N Gumilyov Eurasian Natl Univ, Astana, KAZAKHSTANPublisher DOI
ISSN
0168-583XeISSN
1872-9584Language
EnglishPublication classification
C1 Refereed article in a scholarly journalPublisher
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Keywords
Science & TechnologyTechnologyPhysical SciencesInstruments & InstrumentationNuclear Science & TechnologyPhysics, Atomic, Molecular & ChemicalPhysics, NuclearPhysicsIon trackEtchingSmall angle X-ray scatteringGTSAXSSAXSNANOPORESRECTIFICATION5110 Synchrotrons and accelerators5199 Other physical sciences
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