MTG_Trans_TR_2015.pdf (1.29 MB)
Electrical Analysis of High Dielectric Constant Insulator and Metal Gate Metal Oxide Semiconductor Capacitors on Flexible Bulk Mono-Crystalline Silicon
We report on the electrical study of high dielectric constant insulator and metal gate
metal oxide semiconductor capacitors (MOSCAPs) on a flexible ultra-thin (25 μm) silicon
fabric which is peeled off using a CMOS compatible process from a standard bulk mono-
crystalline silicon substrate. A lifetime projection is extracted using statistical analysis of the
ramping voltage (Vramp) breakdown and time dependent dielectric breakdown data. The
obtained flexible MOSCAPs operational voltages satisfying the 10 years lifetime ...
metal oxide semiconductor capacitors (MOSCAPs) on a flexible ultra-thin (25 μm) silicon
fabric which is peeled off using a CMOS compatible process from a standard bulk mono-
crystalline silicon substrate. A lifetime projection is extracted using statistical analysis of the
ramping voltage (Vramp) breakdown and time dependent dielectric breakdown data. The
obtained flexible MOSCAPs operational voltages satisfying the 10 years lifetime ...
History
Usage metrics
Categories
- Digital electronic devices
- Nanoelectromechanical systems
- Nanobiotechnology
- Nanoelectronics
- Nanofabrication, growth and self assembly
- Nanomanufacturing
- Nanomaterials
- Nanoscale characterisation
- Performance evaluation
- Nanotechnology not elsewhere classified
- Electrical engineering not elsewhere classified
- Engineering practice
- Other engineering not elsewhere classified
- Flexible manufacturing systems
Keywords
reliabilityflexible electronicsmosfetmoscapmemorysiliconlogicmicrofabricationnanotechnologycharacterizationTime dependent dielectric breakdownlifetime projectionsLogic DesignNanoelectromechanical SystemsNanobiotechnologyNanoelectronicsNanofabrication, Growth and Self AssemblyNanomanufacturingNanomaterialsNanoscale CharacterisationPerformance Evaluation; Testing and Simulation of ReliabilityNanotechnology not elsewhere classifiedElectrical and Electronic Engineering not elsewhere classifiedEngineering PracticeEngineering not elsewhere classifiedFlexible Manufacturing Systems
Licence
Exports
RefWorks
BibTeX
Ref. manager
Endnote
DataCite
NLM
DC