posted on 2015-05-07, 03:25authored byLei Yong Lee, Michael Boon Chong Khoo, Sin Yin Teh, Ming Ha Lee
This chart is used to monitor the flow width measurements (in micrometres, μm) for the hard-bake process. The chart signals an out-of-control at the 15th sample which corresponds to the 17th hour from the start of the process.