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The VSI synthetic X¯ chart for the flow width measurements.

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posted on 2015-05-07, 03:25 authored by Lei Yong Lee, Michael Boon Chong Khoo, Sin Yin Teh, Ming Ha Lee

This chart is used to monitor the flow width measurements (in micrometres, μm) for the hard-bake process. The chart signals an out-of-control at the 15th sample which corresponds to the 17th hour from the start of the process.

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