Supplemental data: Cylindrical interferometer for sphere metrology results raw data.

Name: Supplemental data: Cylindrical interferometer for sphere metrology results raw data.
Published: 2021-10-05T17:32:00+00:00
License: https://creativecommons.org/licenses/by/4.0/
Keywords: heterodyne interferometer, nanometrology, surface metrology, sphere surface map, Nanometrology, Lasers and Quantum Electronics

dataset

posted on 2021-10-05, 17:32 authored by Alexander SchultzeAlexander Schultze

Complete datasets for the cylindrical interferometer setup for surface map metrology.

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heterodyne interferometer nanometrology surface metrology sphere surface map Nanometrology Lasers and Quantum Electronics

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CC BY 4.0

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