Calculated and experimental data for figures.xlsx (779.7 kB)

Calculated and experimental data for figures

dataset

posted on 2024-01-24, 09:36 authored by Evgenij Barbin, Tamara Nesterenko, Aleksei KoledaAleksei Koleda, Evgeniy Shesterikov, Ivan Kulinich, Andrey Kokolov, Anton Perin

Dataset for article "The Design, Modeling and Experimental Investigation of a Micro-G Microelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer".

Funding

Russian Scientific Foundation Grant № 21-79-10077, https://rscf.ru/project/21-79-10077/

The state assignment of the Ministry of Science and Higher Education of the Russian Federation (theme no. FEWM-2022-0004

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Keywords

microoptoelectromechanical accelerometer waveguides microoptoelectromechanical sensing element optical measuring transducer sensitivity threshold positioning system

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CC BY 4.0

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