posted on 2024-01-24, 09:36authored byEvgenij Barbin, Tamara Nesterenko, Aleksei KoledaAleksei Koleda, Evgeniy Shesterikov, Ivan Kulinich, Andrey Kokolov, Anton Perin
Dataset for article "The Design, Modeling and Experimental Investigation of a Micro-G Microelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer".
Funding
Russian Scientific Foundation Grant № 21-79-10077, https://rscf.ru/project/21-79-10077/
The state assignment of the Ministry of Science and Higher Education of the Russian Federation (theme no. FEWM-2022-0004