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poster ICSCRM.pdf (1.58 MB)

Poster presented in The International Conference on Silicon Carbide and Related Materials (ICSCRM) 2011

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poster
posted on 2015-12-17, 17:54 authored by Mariana Amorim Fraga
SixCy thin films deposited at low temperature by dual DC magnetron sputtering: Effect of
power supplied to Si and C cathode targets on film physicochemical properties

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    Silicon carbideThin filmssputteringRBS

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