oe-11-18-2244-m001.GIF (922.44 kB)

Media 1: Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

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posted on 2003-09-08, 00:00 authored by D.W. de Lima Monteiro, O. Akhzar-Mehr, P.M. Sarro, G. Vdovin

Originally published in Optics Express on 08 September 2003 (oe-11-18-2244)

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08 September 2003 microfabrication Single-mask media Optics Express aspherical optics KOH anisotropic etching Si oe

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