am9b20471_si_001.pdf (217.69 kB)
Hybrid Thin-Film Encapsulation for All-Solid-State Thin-Film Batteries
journal contribution
posted on 2020-02-28, 21:45 authored by HyunSeok Lee, Keun Yong Lim, Kwang-Bum Kim, Jae-Woong Yu, Won Kook Choi, Ji-Won ChoiAll-solid-state thin-film
batteries have been actively investigated
as a power source for various microdevices. However, insufficient
research has been conducted on thin-film encapsulation, which is an
essential element of these batteries as solid electrolytes and Li
anodes are vulnerable to moisture in the atmosphere. In this study,
a hybrid thin-film encapsulation structure of hybrid SiOy/SiNxOy/a-SiNx:H/Parylene
is suggested and investigated. The water-vapor transmission rate of
hybrid thin-film encapsulation is estimated to be 4.9 × 10–3 g m–2·day–1, a value that is applicable to batteries as well as flexible solar
cells, thin-film transistor liquid-crystal display, and E-papers.
As a result of hybrid thin-film encapsulation, it is confirmed that
the all-solid-state thin-film batteries are stable even after 100
charge/discharge cycles in the air atmosphere for 30 days and present
a Coulombic efficiency of 99.8% even after 100 cycles in the air atmosphere.
These results demonstrate that the thin-film encapsulation structure
of hybrid SiOy/SiNxOy/a-SiNx:H/Parylene can be employed in thin-film batteries
while retaining long-term stability.