Release-free silicon-on-insulator cavity optomechanics
Posted on 2017-09-14 - 17:53
We demonstrate optically coupled nanomechanical resonators fabricated on silicon-on-insulator. Silicon fin waveguides are used to control the dispersion of mechanical waves and engineer localized resonances by modulation of the fin properties. A photonic crystal cavity is designed to localize laser light near the fin and the mechanical motion is read out and modified by radiation pressure back-action. We expect devices and systems made from similar structures to enable co-integration of signal transduction and processing capabilities via electronic, photonic, and phononic degrees freedom in a single scalable platform.
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Sarabalis, Christopher; Dahmani, Yanni; Patel, Rishi; Hill, Jeff; Safavi-Naeini, Amir (2017). Release-free silicon-on-insulator cavity optomechanics. Optica Publishing Group. Collection. https://doi.org/10.6084/m9.figshare.c.3859537.v1
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AUTHORS (5)
CS
Christopher Sarabalis
YD
Yanni Dahmani
RP
Rishi Patel
JH
Jeff Hill
AS
Amir Safavi-Naeini