Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges
Posted on 2017-04-28 - 15:26
In this paper, attributes of chalcogenide glass (ChG) based integrated devices are discussed in detail, including origins of optical loss and processing steps used to reduce their contributions to optical component performance. Specifically, efforts to reduce loss and tailor optical characteristics of planar devices utilizing solution-based glass processing and thermal reflow techniques are presented and their results quantified. Post-fabrication trimming techniques based on the intrinsic photosensitivity of the chalcogenide glass are exploited to compensate for fabrication imperfections of ring resonators. Process parameters and implications on enhancement of device fabrication flexibility are presented.
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Carlie, Nathan; Musgraves, J. David; Zdyrko, Bogdan; Luzinov, Igor; Hu, Juejun; Singh, Vivek; et al. (2010). Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges. Optica Publishing Group. Collection. https://doi.org/10.6084/m9.figshare.c.3762833.v1
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AUTHORS (12)
NC
Nathan Carlie
JM
J. David Musgraves
BZ
Bogdan Zdyrko
IL
Igor Luzinov
JH
Juejun Hu
VS
Vivek Singh
AA
Anu Agarwal
LK
Lionel C. Kimerling
AC
Antonio Canciamilla
FM
Francesco Morichetti
AM
Andrea Melloni
KR
Kathleen Richardson