Defect detection based on lensless reflective point diffraction interferometer
Published on 2017-09-07T16:23:58Z (GMT) by
We propose a defect detection system to identify phase defects on optics based on a lensless reflective point diffraction interferometer (LRPDI). The optics under test is illuminated by a collimated beam to produce signal wavefront carrying the defect information, and then the signal wavefront is recorded in a high carrier interferogram using the LRPDI. By lensless imaging, amplitude and phase defects as well as the accurate phase of a phase defect can be identified. The simulation and experiment demonstrate the success of the proposed system in detecting phase defects, and its high-accuracy and high-resolution dynamic detection ability are verified.
Cite this collection
Zhu, Wenhua; Chen, Lei; Liu, Yiming; Ma, Yun; Zheng, Donghui; Han, Zhigang; Li, Jinpeng (2017): Defect detection based on lensless reflective point diffraction interferometer. The Optical Society. Collection.