Vapor-based processes are promising
options to deposit metal halide
perovskite solar cells in an industrial environment due to their ability
to deposit uniform layers over large areas in a controlled environment
without resorting to the use of (possibly toxic) solvents. In addition,
they yield conformal layers on rough substrates, an important aspect
in view of producing perovskite/crystalline silicon tandem solar cells
featuring a textured silicon wafer for light management. While the
inorganic precursors of the perovskite are well suited for thermal
evaporation in high vacuum, the sublimation of the organic ones is
more complex to control due to their high vapor pressure. To tackle
this issue, we developed a vapor transport deposition chamber for
organohalide deposition that physically dissociates the organic vapor
evaporation zone from the deposition chamber. Once evaporated, organic
vapors, here methylammonium iodide (MAI), are transported to the deposition
chamber by a carrier gas through a showerhead, ensuring a spatially
homogeneous conversion of PbI2 templates to the perovskite
phase. The method enables the production of homogeneous perovskite
layers on a textured 6 in. wafer. Furthermore, small-scale methylammonium
lead iodide solar cells are also processed to validate the quality
of the absorbers produced by this hybrid thermal evaporation/vapor
transport deposition process.