Supplementary document for Fast diffraction model of lithography mask based on improved pixel-to-pixel generative adversarial network - 6481639.pdf
Version 3 2023-07-11, 21:44
Version 2 2023-07-11, 21:33
Version 1 2023-07-11, 21:32
journal contribution
posted on 2023-07-11, 21:44 authored by Junbi Zhang, Xu MaThe difference plots of DNFs between the rigorous EMF method and various deep learning models
