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Submicrometer Resolution Hyperspectral Quantum Rod Thermal Imaging of Microelectronic Devices
journal contribution
posted on 2020-01-14, 22:44 authored by Bahar Öner, James W. Pomeroy, Martin KuballThe
trend of electronic device miniaturization, from
the microscale
to the nanoscale, presents a temperature measurement challenge. The
available techniques have limitations in terms of either resolution,
calibration, acquisition time, or equipment cost. Here we demonstrate
a thermography technique called hyperspectral quantum rod thermal
imaging (HQTI), which exploits temperature-dependent photoluminescence
(PL) emission of quantum rods to obtain the surface temperature map
of a biased electronic device, with a straightforward calibration.
This method uses relatively simple, low-cost equipment, while achieving
submicrometer spatial resolution. This technique is demonstrated by
measuring the thermal map of a direct current (dc) operated gallium
nitride (GaN) high electron mobility transistor (HEMT), achieving
a temperature precision of ∼4 °C and an ∼700–800
nm estimated lateral optical resolution. This is a versatile method
for measurement both in submicrometer scale regions of interest and
of larger areas in the hundreds of micrometers range.
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temperature precisionequipment costMicroelectronic Devicessurface temperature maphyperspectral quantum rodelectron mobility transistorHQTItemperature measurement challengecalibrationmicrometers rangesubmicrometer scale regionsmethodPLacquisition timedevice miniaturizationSubmicrometer Resolution Hyperspectral Quantum Rodthermography techniqueHEMTgallium nitridequantum rodsexploits temperature-dependent photoluminescence
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