Because
of the direct band gap of 4.9 eV, β-Ga2O3 has been considered as an ideal material for solar-blind photodetection
without any bandgap tuning. Practical applications of the photodetectors
require fast response speed, high signal-to-noise ratio, low energy
consumption and low fabrication cost. Unfortunately, most reported
β-Ga2O3-based photodetectors usually possess
a relatively long response time. In addition, the β-Ga2O3 photodetectors based on bulk, the individual 1D nanostructure,
and the film often suffer from the high cost, the low repeatability,
and the relatively large dark current, respectively. In this paper,
a Au/β-Ga2O3 nanowires array film vertical
Schottky photodiode is successfully fabricated by a simple thermal
partial oxidation process. The device exhibits a very low dark current
of 10 pA at −30 V with a sharp cutoff at 270 nm. More interestingly,
the 90–10% decay time of our device is only around 64 μs,
which is much quicker than any other previously reported β-Ga2O3-based photodetectors. Besides, the self-powering,
the excellent stability and the good reproducibility of Au/β-Ga2O3 nanowires array film photodetector are helpful
to its commercialization and practical applications.