preprint_manganese_precursors_jpcc2017_10277h_author_version.pdf (4.01 MB)
Manganese(II) Molecular Sources for Plasma-Assisted CVD of Mn Oxides and Fluorides: From Precursors to Growth Process
Author version of the article:
Manganese(II) Molecular Sources for Plasma-Assisted CVD of Mn Oxides and Fluorides: From Precursors to Growth Process
by Barreca D, Carraro G, Fois E, Gasparotto A, Gri F, Seraglia R, Wilken M, Venzo A, Devi A, Tabacchi G,Maccato C
(accepted manuscript)
To be cited as:
J. Phys. Chem. C, 2018, 122, 1367–1375
DOI: 10.1021/acs.jpcc.7b10277
Links to official published version, popular summary of the paper, supporting data and movies are given below
Funding
Financial support from Padova University ex-60% 2015–2017, P-DiSC #SENSATIONAL BIRD2016-UNIPD projects, and ACTION postdoc fellowship, as well as from Insubria University FAR 2015-2016, is gratefully acknowledged.
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- Inorganic materials (incl. nanomaterials)
- Macromolecular materials
- Structure and dynamics of materials
- Other chemical sciences not elsewhere classified
- Colloid and surface chemistry
- Computational chemistry
- Inorganic chemistry not elsewhere classified
- Nanochemistry
- Supramolecular chemistry
- Organometallic chemistry
- Physical chemistry not elsewhere classified
- Physical properties of materials
- Theoretical quantum chemistry
- Solid state chemistry
- Macromolecular and materials chemistry not elsewhere classified
- Theoretical and computational chemistry not elsewhere classified
- Theory and design of materials
- Transition metal chemistry
- Nanoscale characterisation
- Nanotechnology not elsewhere classified
- Nanomaterials
- Nanofabrication, growth and self assembly
- Condensed matter physics not elsewhere classified
- Condensed matter modelling and density functional theory
- Structural properties of condensed matter
- Surface properties of condensed matter
Keywords
chemical vapor depositionatomic layer depositionCVDprecursorsTransition MetalsTransition metal compoundstransition metal oxidesTransition metal fluoridesnanostructuresnanostructured surfacesnanolayernanolayer surface morphologyIR spectroscopyInfrared spectroscopyIR spectraDFT Calculationsmodeling and simulationscomputational modelingsurface sciencesurface chemistrybottom-up fabricationmaterial characterization techniquesmaterial sciencemanganesemanganese oxidesmanganese fluoridesmanganese complexesMnXPSX-ray photoemission spectroscopyX-ray photoelectron spectroscopyelectron impact mass spectrometryelectron impact mass spectraEI-MSFT-IR spectroscopic techniquesDensity Functional Theorymolecular dynamicsfirst prìnciples molecular dynamicsFPMDFPMD simulationsFPMD trajectoryNMR experimentsNMR spectrumNMR SpectroscopyParamagnetic complexesplasma Assisted chemical vapor depositionPA-CVD processesPA-CVDPlasma Assisted CVDPlasma Enhanced CVDChemical Characterisation of MaterialsChemical Sciences not elsewhere classifiedColloid and Surface ChemistryComputational ChemistryInorganic Chemistry not elsewhere classifiedNanochemistry and Supramolecular ChemistryOrganometallic ChemistryPhysical Chemistry not elsewhere classifiedPhysical Chemistry of MaterialsQuantum ChemistrySolid State ChemistrySynthesis of MaterialsTheoretical and Computational Chemistry not elsewhere classifiedTheory and Design of MaterialsTransition Metal ChemistryNanoscale CharacterisationNanotechnology not elsewhere classifiedNanomaterialsNanofabrication, Growth and Self AssemblyCondensed Matter PhysicsCondensed Matter Physics not elsewhere classifiedCondensed Matter Modelling and Density Functional TheorySurfaces and Structural Properties of Condensed Matter
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