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Manganese(II) Molecular Sources for Plasma-Assisted CVD of Mn Oxides and Fluorides: From Precursors to Growth Process

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posted on 2018-02-02, 19:04 authored by gloria tabacchigloria tabacchi
Author version of the article:

Manganese(II) Molecular Sources for Plasma-Assisted CVD of Mn Oxides and Fluorides: From Precursors to Growth Process

by Barreca D, Carraro G, Fois E, Gasparotto A, Gri F, Seraglia R, Wilken M, Venzo A, Devi A, Tabacchi G,Maccato C
(accepted manuscript)


To be cited as:
J. Phys. Chem. C, 2018, 122, 1367–1375
DOI: 10.1021/acs.jpcc.7b10277

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Funding

Financial support from Padova University ex-60% 2015–2017, P-DiSC #SENSATIONAL BIRD2016-UNIPD projects, and ACTION postdoc fellowship, as well as from Insubria University FAR 2015-2016, is gratefully acknowledged.

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    Keywords

    chemical vapor depositionatomic layer depositionCVDprecursorsTransition MetalsTransition metal compoundstransition metal oxidesTransition metal fluoridesnanostructuresnanostructured surfacesnanolayernanolayer surface morphologyIR spectroscopyInfrared spectroscopyIR spectraDFT Calculationsmodeling and simulationscomputational modelingsurface sciencesurface chemistrybottom-up fabricationmaterial characterization techniquesmaterial sciencemanganesemanganese oxidesmanganese fluoridesmanganese complexesMnXPSX-ray photoemission spectroscopyX-ray photoelectron spectroscopyelectron impact mass spectrometryelectron impact mass spectraEI-MSFT-IR spectroscopic techniquesDensity Functional Theorymolecular dynamicsfirst prìnciples molecular dynamicsFPMDFPMD simulationsFPMD trajectoryNMR experimentsNMR spectrumNMR SpectroscopyParamagnetic complexesplasma Assisted chemical vapor depositionPA-CVD processesPA-CVDPlasma Assisted CVDPlasma Enhanced CVDChemical Characterisation of MaterialsChemical Sciences not elsewhere classifiedColloid and Surface ChemistryComputational ChemistryInorganic Chemistry not elsewhere classifiedNanochemistry and Supramolecular ChemistryOrganometallic ChemistryPhysical Chemistry not elsewhere classifiedPhysical Chemistry of MaterialsQuantum ChemistrySolid State ChemistrySynthesis of MaterialsTheoretical and Computational Chemistry not elsewhere classifiedTheory and Design of MaterialsTransition Metal ChemistryNanoscale CharacterisationNanotechnology not elsewhere classifiedNanomaterialsNanofabrication, Growth and Self AssemblyCondensed Matter PhysicsCondensed Matter Physics not elsewhere classifiedCondensed Matter Modelling and Density Functional TheorySurfaces and Structural Properties of Condensed Matter

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