This dataset corresponds to the published journal paper: "Pragmatic Micrometre to Millimetre Calibration Using Multiple Methods for Low-Coherence Interferometer in Embedded Metrology Applications"<div><br></div><div>Abbreviation definitions:</div><div><br></div><div>LCI - Low coherence interferometer sensor data</div><div>Renishaw - Renishaw XL-80 sensor data</div><div>RM - Reference material</div><div>CS - Coverslip</div><div>SH - Step height</div><div>RA: Renishaw versus LCI sensor in air<br></div><div>RP: Renishaw versus LCI sensor in paraffin oil</div><div>RW: Renishaw versus LCI sensor in water</div><div>RMWF: Renishaw versus LCI sensor in metal working fluid</div><div> </div><div><br><div><br></div></div>