Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform

Zhu, Jiadi; Park, Ji-Hoon; Vitale, Steven A.; Ge, Wenjun; Jung, Gang Seob; Wang, Jiangtao; Mohamed, Mohamed; Zhang, Tianyi; Ashok, Maitreyi; Xue, Mantian; Zheng, Xudong; Wang, Zhien; Hansryd, Jonas; Chandrakasan, Anantha P.; Kong, Jing; Palacios, Tomás

doi:10.1038/s41565-023-01375-6

Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform

journal contribution

posted on 2023-04-27, 21:32 authored by Jiadi Zhu, Ji-Hoon Park, Steven A. Vitale, Wenjun Ge, Gang Seob Jung, Jiangtao Wang, Mohamed Mohamed, Tianyi Zhang, Maitreyi Ashok, Mantian Xue, Xudong Zheng, Zhien Wang, Jonas Hansryd, Anantha P. Chandrakasan, Jing Kong, Tomás Palacios

Data related to MOCVD and MoS2 BEOL

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MOCVD approach BEOL

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Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform

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