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Electrical Double Layer Catalyzed Wet-Etching of Silicon Dioxide

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posted on 2009-12-02, 00:00 authored by Haitao Liu, Michael L. Steigerwald, Colin Nuckolls
Electrical Double Layer Catalyzed Wet-Etching of Silicon Dioxide

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    Journal of the American Chemical Society

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    Keywords

    DioxideSiliconElectricalCatalyzedDioxideElectrical

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    CC BY-NC 4.0

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