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The peaks of O and Ni in the ESCA analysis.

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posted on 2016-06-21, 19:49 authored by Shoji Hayashi, Shuta Sugiyama, Kojiro Shimura, Go Tobayama, Toshio Togashi

The changes in the peaks of O and Ni. The peak of O is observed in the range between 532 and 534 eV and is noticeable until an etching period of 8 minutes. The peak of Ni is observed around 853 eV. It is not observed in the top surface layer but becomes gradually noticeable from Layer 2, and the spectral band intensity increases as the etching period increases.