The datasets for the electron trajectories for Cu, Au, Al, Si, and C generated in this study are publicly available in the Figshare repository. The repository includes a folder reads “Trajectories of Cu, Au, Al, Si, C”:
Then, in this folder, you will have 5 folders:
1. Cu data: “Cu all thicknesses”
2. Au data: “Au all thicknesses”
3. Al data: “Al all thicknesses”
4. Si data: “Si all thicknesses”
5. C data: “C all thicknesses”
Each folder contains an Excel file containing all the trajectory data, including 3 sheets for the thicknesses (100 Å, 1000 Å, and 5000 Å) of the corresponding material.