Data for The Rect-SRAF Method ILT

This is the data of the paper titled "The Rect-SRAF Method in Inverse Lithography Technology".

The source graphic and anchor pattern are saved in file "SourceAndAnchor.mat".

The test results for each type of pattern are saved separately in a Matlab file.

The Target is the target pattern. The CTM is the continuous transmission mask (CTM). The x/y_CTM, x/y_mask and x/y_image are the coordinates of CTM, mask and aerial image, respectively. The OutputMask_rect and OutputMask_curve are the output masks of the method with rectangular SRAFs and the method with curved SRAFs. The parameters marked with "Manhattan" are the results of the corresponding output mask with Manhattan transformed.