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Visualization 2: Highly sensitive lateral deformable optical MEMS displacement sensor: anomalous diffraction studied by rigorous coupled-wave analysis

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posted on 2015-10-20, 00:00 authored by Chen Wang, Qianbo Lu, Jian Bai, Guoguang Yang, Kaiwei Wang, Dong Liu, Yongying Yang
video2 Originally published in Applied Optics on 20 October 2015 (ao-54-30-8935)

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