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Media 2: Parametric modeling of edge effects for polishing tool influence functions

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posted on 2009-03-30, 00:00 authored by Dae Wook Kim, Won Hyun Park, Sug-Whan Kim, James H. Burge
Originally published in Optics Express on 30 March 2009 (oe-17-7-5656)

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    Optics Express

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    Optics Expressedge effects30 March 2009mediatool influence functionsmodelingParametricoe

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    CC BY 4.0

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