figshare
Browse
oe-19-14-13343-m002.MPG (3.63 MB)

Media 2: Characterization of wet pad surface in chemical mechanical polishing (CMP) process with full-field optical coherence tomography (FF-OCT)

Download (3.63 MB)
media
posted on 2011-07-04, 00:00 authored by Woo June Choi, Sung Pyo Jung, Jun Geun Shin, Danning Yang, Byeong Ha Lee
Originally published in Optics Express on 04 July 2011 (oe-19-14-13343)

History