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Manganese(II) Molecular Sources for Plasma-Assisted CVD of Mn Oxides and Fluorides: From Precursors to Growth Process
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Manganese(II) Molecular Sources for Plasma-Assisted CVD of Mn Oxides and Fluorides: From Precursors to Growth Process
by
Davide Barreca , Giorgio Carraro , Ettore Fois, Alberto Gasparotto, Filippo Gri, Roberta Seraglia, Martin Wilken, Alfonso Venzo, Anjana Devi , Gloria Tabacchi*, and Chiara Maccato*
First published December 21, 2017, in:
J. Phys. Chem. C
DOI: 10.1021/acs.jpcc.7b10277
Funding
Financial support from Padova University ex-60% 2015–2017, P-DiSC #SENSATIONAL BIRD2016-UNIPD projects, and ACTION postdoc fellowship, as well as from Insubria University FAR 2015-2016, is gratefully acknowledged.
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chemical vapor depositionCVDplasma-assisted depositionplasma-enhanced CVD routemanganese oxidemanganese fluoridesmanganese compexesmodeling and simulationXPSmass spectrometryEI-MSFT-IR spectrumDFT CalculationsFirst Principles Molecular DynamicsNanomaterialsNanoscale CharacterisationNanotechnology not elsewhere classifiedNanofabrication, Growth and Self Assembly
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