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IEEE_2018-final EF.
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posted on 2018-12-12, 10:31
authored by
Michael Nolan
Poster presentation by Ekaterina at IEEE Nano 2018
Funding
LAM Research
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Categories
Colloid and surface chemistry
Inorganic chemistry not elsewhere classified
Physical properties of materials
Keywords
silicon
area selective ald
ald
dft
surface chemistry
Colloid and Surface Chemistry
Inorganic Chemistry not elsewhere classified
Physical Chemistry of Materials
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CC BY 4.0
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