Development of Solid State Lighting Based Microfabrication Systems for Semiconductor and MEMS Device Fabrication

2018-12-04T05:28:55Z (GMT) by NEAM HENG LEE
Microelectronic devices like integrated circuits (IC) chips are key components in modern day electronic products ranging from smartphones to industrial automation systems. In general, these tiny devices are manufactured through extensive processes like photolithography using microfabrication equipments such as mask aligner system. The thesis research focused on translating fundamental optical properties of solid state lighting devices such as ultraviolet LEDs and organic LEDs to prototype first lens less mask aligner system for photolithography process . The research work aided towards development of inventive microfabrication fabrication equipments that has potential to fabricate micrometer sized functional devices .