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Additional file 1: of Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition

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posted on 2016-09-17, 05:00 authored by Chen-Hui Zhai, Rong-Jun Zhang, Xin Chen, Yu-Xiang Zheng, Song-You Wang, Juan Liu, Ning Dai, Liang-Yao Chen
Supporting information. (DOCX 298 KB)

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the National Natural Science Foundation of China

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    Nanoscale Research Letters

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    Keywords

    Al-doped ZnO thin filmsAtomic layer depositionOptical propertiesSpectroscopic ellipsometryElectrical properties

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