%0 Journal Article %A Saastamoinen, Kimmo %A Leppänen, Lasse-Petteri %A Vartiainen, Ismo %A Friberg, Ari Tapio %A Setala, Tero %D 2018 %T 3046222.pdf %U https://opticapublishing.figshare.com/articles/journal_contribution/3046222_pdf/5693074 %R 10.6084/m9.figshare.5693074.v1 %2 https://ndownloader.figshare.com/files/10238844 %K Supplemental material %X Supplemental document on used methods, analysis and fabrication. %I Optica Publishing Group