10.1364/OE.3.000280.m001
Olivier J. F. Martin
Olivier
J. F. Martin
Nicolas B. Piller
Nicolas B.
Piller
Heinz Schmid
Heinz
Schmid
Hans Biebuyck
Hans
Biebuyck
Bruno Michel
Bruno
Michel
Media 1: Energy flow in light-coupling masks for lensless optical lithography
Optica Publishing Group
1998
lensles
media
flow
28 September 1998
Optics Express
lithography
light-coupling masks
oe
1998-09-28 00:00:00
Media
https://opticapublishing.figshare.com/articles/media/Media_1_Energy_flow_in_light-coupling_masks_for_lensless_optical_lithography/4951979
Originally published in Optics Express on 28 September 1998 (oe-3-7-280)