10.1364/OE.3.000280.m001 Olivier J. F. Martin Olivier J. F. Martin Nicolas B. Piller Nicolas B. Piller Heinz Schmid Heinz Schmid Hans Biebuyck Hans Biebuyck Bruno Michel Bruno Michel Media 1: Energy flow in light-coupling masks for lensless optical lithography Optica Publishing Group 1998 lensles media flow 28 September 1998 Optics Express lithography light-coupling masks oe 1998-09-28 00:00:00 Media https://opticapublishing.figshare.com/articles/media/Media_1_Energy_flow_in_light-coupling_masks_for_lensless_optical_lithography/4951979 Originally published in Optics Express on 28 September 1998 (oe-3-7-280)