@article{J. F. Martin2017, author = "Olivier J. F. Martin and Nicolas B. Piller and Heinz Schmid and Hans Biebuyck and Bruno Michel", title = "{Media 1: Energy flow in light-coupling masks for lensless optical lithography}", year = "2017", month = "4", url = "https://opticapublishing.figshare.com/articles/media/Media_1_Energy_flow_in_light-coupling_masks_for_lensless_optical_lithography/4951979", doi = "10.1364/OE.3.000280.m001" }