%0 Online Multimedia %A Döring, Sven %A Szilagyi, John %A Richter, Sören %A Zimmermann, Felix %A Richardson, Martin %A Tünnermann, Andreas %A Nolte, Stefan %D 2012 %T Media 2: Evolution of hole shape and size during short and ultrashort pulse laser deep drilling %U https://opticapublishing.figshare.com/articles/media/Media_2_Evolution_of_hole_shape_and_size_during_short_and_ultrashort_pulse_laser_deep_drilling/4944737 %R 10.1364/OE.20.027147.m002 %2 https://ndownloader.figshare.com/files/8312576 %K hole shape %K media %K Optics Express %K 19 November 2012 %K Evolution %K drilling %K oe %K ultrashort pulse laser %X Originally published in Optics Express on 19 November 2012 (oe-20-24-27147) %I Optica Publishing Group