%0 Online Multimedia %A Choi, Woo June %A Jung, Sung Pyo %A Geun Shin, Jun %A Yang, Danning %A Ha Lee, Byeong %D 2011 %T Media 2: Characterization of wet pad surface in chemical mechanical polishing (CMP) process with full-field optical coherence tomography (FF-OCT) %U https://opticapublishing.figshare.com/articles/media/Media_2_Characterization_of_wet_pad_surface_in_chemical_mechanical_polishing_CMP_process_with_full-field_optical_coherence_tomography_FF-OCT_/4942535 %R 10.1364/OE.19.013343.m002 %2 https://ndownloader.figshare.com/files/8310251 %K CMP %K pad surface %K media %K Optics Express %K chemical %K coherence tomography %K full-field %K 04 July 2011 %K Characterization %K oe %K FF-OCT %X Originally published in Optics Express on 04 July 2011 (oe-19-14-13343) %I Optica Publishing Group