%0 Online Multimedia %A Wook Kim, Dae %A Hyun Park, Won %A Kim, Sug-Whan %A Burge, James H. %D 2009 %T Media 2: Parametric modeling of edge effects for polishing tool influence functions %U https://opticapublishing.figshare.com/articles/media/Media_2_Parametric_modeling_of_edge_effects_for_polishing_tool_influence_functions/4940615 %R 10.1364/OE.17.005656.m002 %2 https://ndownloader.figshare.com/files/8308331 %K Optics Express %K edge effects %K 30 March 2009 %K media %K tool influence functions %K modeling %K Parametric %K oe %X Originally published in Optics Express on 30 March 2009 (oe-17-7-5656) %I Optica Publishing Group