@article{Bellouard2017, author = "Yves Bellouard and Ali A. Said and Philippe Bado", title = "{Media 9: Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica.}", year = "2017", month = "4", url = "https://opticapublishing.figshare.com/articles/media/Media_9_Integrating_optics_and_micro-mechanics_in_a_single_substrate_a_step_toward_monolithic_integration_in_fused_silica_/4933049", doi = "10.1364/OPEX.13.006635.m009" }