Media 2: Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica. Yves Bellouard Ali A. Said Philippe Bado 10.1364/OPEX.13.006635.m002 https://opticapublishing.figshare.com/articles/media/Media_2_Integrating_optics_and_micro-mechanics_in_a_single_substrate_a_step_toward_monolithic_integration_in_fused_silica_/4932974 Originally published in Optics Express on 22 August 2005 (oe-13-17-6635) 2005-08-22 00:00:00 substrate optic Integrating media oe Optics Express integration micro-mechanic 22 August 2005