Media 2: Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica.
Yves Bellouard
Ali A. Said
Philippe Bado
10.1364/OPEX.13.006635.m002
https://opticapublishing.figshare.com/articles/media/Media_2_Integrating_optics_and_micro-mechanics_in_a_single_substrate_a_step_toward_monolithic_integration_in_fused_silica_/4932974
Originally published in Optics Express on 22 August 2005 (oe-13-17-6635)
2005-08-22 00:00:00
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Optics Express
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22 August 2005