Media 1: Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
D.W. de Lima Monteiro
O. Akhzar-Mehr
P.M. Sarro
G. Vdovin
10.1364/OE.11.002244.m001
https://opticapublishing.figshare.com/articles/media/Media_1_Single-mask_microfabrication_of_aspherical_optics_using_KOH_anisotropic_etching_of_Si/4930835
Originally published in Optics Express on 08 September 2003 (oe-11-18-2244)
2003-09-08 00:00:00
08 September 2003
microfabrication
Single-mask
media
Optics Express
aspherical optics
KOH anisotropic etching
Si
oe