Media 1: Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si D.W. de Lima Monteiro O. Akhzar-Mehr P.M. Sarro G. Vdovin 10.1364/OE.11.002244.m001 https://opticapublishing.figshare.com/articles/media/Media_1_Single-mask_microfabrication_of_aspherical_optics_using_KOH_anisotropic_etching_of_Si/4930835 Originally published in Optics Express on 08 September 2003 (oe-11-18-2244) 2003-09-08 00:00:00 08 September 2003 microfabrication Single-mask media Optics Express aspherical optics KOH anisotropic etching Si oe