TY - DATA T1 - Visualization 1: Highly sensitive lateral deformable optical MEMS displacement sensor: anomalous diffraction studied by rigorous coupled-wave analysis PY - 2015/10/20 AU - Chen Wang AU - Qianbo Lu AU - Jian Bai AU - Guoguang Yang AU - Kaiwei Wang AU - Dong Liu AU - Yongying Yang UR - https://opticapublishing.figshare.com/articles/media/Visualization_1_Highly_sensitive_lateral_deformable_optical_MEMS_displacement_sensor_anomalous_diffraction_studied_by_rigorous_coupled-wave_analysis/4899476 DO - 10.1364/AO.54.008935.v001 L4 - https://ndownloader.figshare.com/files/8234669 KW - Visualization KW - deformable KW - ao KW - coupled-wave analysis video 1 KW - Applied Optics KW - 20 October 2015 KW - MEMS displacement sensor KW - diffraction N2 - video1 Originally published in Applied Optics on 20 October 2015 (ao-54-30-8935) ER -