TY - DATA T1 - Catalyst Enhanced Chemical Vapor Deposition:  Effects on Chemical Vapor Deposition Temperature and Film Purity PY - 1997/10/01 AU - Yiping Zhang AU - Sam W.-K. Choi AU - Richard J. Puddephatt UR - https://acs.figshare.com/articles/journal_contribution/Catalyst_Enhanced_Chemical_Vapor_Deposition_Effects_on_Chemical_Vapor_Deposition_Temperature_and_Film_Purity/3666129 DO - 10.1021/ja971588l.s001 L4 - https://ndownloader.figshare.com/files/5755857 KW - Chemical Vapor Deposition Temperature KW - Purity KW - Enhanced KW - Film N2 - Catalyst Enhanced Chemical Vapor Deposition:  Effects on Chemical Vapor Deposition Temperature and Film Purity ER -