%0 Journal Article %A Xu, Xiaochuan %A Subbaraman, Harish %A Chakravarty, Swapnajit %A Hosseini, Amir %A Covey, John %A Yu, Yalin %A Kwong, David %A Zhang, Yang %A Lai, Wei-Cheng %A Zou, Yi %A Lu, Nanshu %A Chen, Ray T. %D 2014 %T Flexible Single-Crystal Silicon Nanomembrane Photonic Crystal Cavity %U https://acs.figshare.com/articles/journal_contribution/Flexible_Single_Crystal_Silicon_Nanomembrane_Photonic_Crystal_Cavity/2223103 %R 10.1021/nn504393j.s001 %2 https://ndownloader.figshare.com/files/3859030 %K 5 mm radius %K silicon photonic components %K devices promise %K substrate removal approach %K silicon photonic devices %K quality factor %K ambient index variation %X Flexible inorganic electronic devices promise numerous applications, especially in fields that could not be covered satisfactorily by conventional rigid devices. Benefits on a similar scale are also foreseeable for silicon photonic components. However, the difficulty in transferring intricate silicon photonic devices has deterred widespread development. In this paper, we demonstrate a flexible single-crystal silicon nanomembrane photonic crystal microcavity through a bonding and substrate removal approach. The transferred cavity shows a quality factor of 2.2 × 104 and could be bent to a curvature of 5 mm radius without deteriorating the performance compared to its counterparts on rigid substrates. A thorough characterization of the device reveals that the resonant wavelength is a linear function of the bending-induced strain. The device also shows a curvature-independent sensitivity to the ambient index variation. %I ACS Publications